Vacuum acquisition system

technical parameter Technical Parameter:

The vacuum system is equipped with a set of vacuum pump groups and air valves controlled by PLC in the entrance section, sputtering section and exit section respectively. Vacuum system is divided into two working mode including vacuum and atmosphere. In the vacuum operating mode, there are two types of operation: automatic and manual. For the protection of vacuum pump groups, the system is equipped with safety interlocks for each vacuum pump and door valve at the hardware and software levels. Even if the on-site operator makes mistakes, it will not cause the vacuum pump group to fail.

Control mode:
·Function of Automatic pumping and being ready for production after maintenance.
· Automatic pressure holding function for stopping production.
·Overall air bleeding and partial air bleeding function.
·Automatic switching between normal mode and ultra-long mode of production.
· Function of Normal pumping and being ready for production.
·Associated Control of vacuum pump vacuum chamber air bleeding.